BEAPLAS Metallisation is using sputtering at atmospheric pressure. Research activities in this area had been started at the Ferdinand-Braun-Institut in Berlin several years ago and are continued at BEAPLAS, spin off of the Ferdinand-Braun-Institut. BEAPLAS is today the only supplier of this Technology worldwide. 

Functional Principle

The coating heat contains a target wire, made from the coating material. This can be e. g. Gold, Copper, Platinum or Palladium. A process gas is fed to the coating head, a electric voltage is applied at the target. This causes a plasma ignition at the target tip. Ions are accelerated towards the target and evaporate the target material. This causes a target material vapor forming the desred coating on the substrate. 

Applications

• Contact coating
• REM probe preparation
• Hybride 3D-Structures

Further Informations

• Datasheet

• 18.03.2015 ak-adp, Jena

• Sputtern an Atmosphärendruck (German)

• Galvanotechnik 11/2015, Eugen G. Leutze Verlag, pp. 2268-2273
• Jan Bickel, Martin Krellmann, Roland Gesche, Reinhold Kovacs, Joachim Scherer
  Sputtern an Atmosphärendruck (German)